Invention Grant
US08524313B2 Method for manufacturing a device 有权
制造装置的方法

Method for manufacturing a device
Abstract:
A method for manufacturing a device, including evaporating a material at a first position, and moving a container that includes the material to a second position, so that an opening of the container is heated at a second temperature higher than a first temperature, the first temperature being a temperature of the opening at the first position, is provided.
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