Invention Grant
- Patent Title: Photoresist composition
- Patent Title (中): 光刻胶组成
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Application No.: US12983729Application Date: 2011-01-03
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Publication No.: US08524440B2Publication Date: 2013-09-03
- Inventor: Yuko Yamashita , Nobuo Ando
- Applicant: Yuko Yamashita , Nobuo Ando
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Hogan Lovells US LLP
- Priority: JP2010-000371 20100105
- Main IPC: G03F7/26
- IPC: G03F7/26

Abstract:
The present invention provides a photoresist composition comprisinga resin which comprises a structural unit represented by the formula (I): wherein Q1 and Q2 independently represent a fluorine atom etc., U represents a C1-C20 divalent hydrocarbon group etc., X1 represents —O—CO— etc., and A+ represents an organic counter ion, and a compound represented by the formula (D′): wherein R51, R52, R53 and R54 independently represent a C1-C20 alkyl group etc., and A11 represents a C1-C36 saturated cyclic hydrocarbon group which may have one or more substituents and which may contain one or more heteroatoms.
Public/Granted literature
- US20110165513A1 PHOTORESIST COMPOSITION Public/Granted day:2011-07-07
Information query
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