Invention Grant
US08524443B2 Method and apparatus for printing a periodic pattern with a large depth of focus
有权
用于打印具有较大焦深的周期性图案的方法和装置
- Patent Title: Method and apparatus for printing a periodic pattern with a large depth of focus
- Patent Title (中): 用于打印具有较大焦深的周期性图案的方法和装置
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Application No.: US12831337Application Date: 2010-07-07
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Publication No.: US08524443B2Publication Date: 2013-09-03
- Inventor: Francis S. M. Clube , Christian Dais , Harun H. Solak
- Applicant: Francis S. M. Clube , Christian Dais , Harun H. Solak
- Applicant Address: CH Villigen PSI
- Assignee: Eulitha A.G.
- Current Assignee: Eulitha A.G.
- Current Assignee Address: CH Villigen PSI
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A method for printing a desired pattern into a photosensitive layer that includes providing a mask bearing a pattern of linear features that are parallel to a first direction, arranging the layer parallel to and separated from said mask, generating substantially monochromatic light, and illuminating the mask pattern with said light over a range of angles of incidence in a plane parallel to said first direction, at substantially a single angle in an orthogonal plane of incidence and so that the light of each angle of incidence transmitted by the mask forms a light-field component at the layer whereby the integration of said components prints the desired pattern, wherein the range of angles is selected so that the integration of said components is substantially equivalent to an average of the range of transversal intensity distributions formed between Talbot image planes by light at one of the angles of incidence.
Public/Granted literature
- US20120009525A1 Method and apparatus for printing a periodic pattern with a large depth of focus Public/Granted day:2012-01-12
Information query
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