Invention Grant
US08524512B2 Method for repairing copper diffusion barrier layers on a semiconductor solid substrate and repair kit for implementing this method 失效
在半导体固体基板上修复铜扩散阻挡层的方法以及用于实施该方法的修理工具

  • Patent Title: Method for repairing copper diffusion barrier layers on a semiconductor solid substrate and repair kit for implementing this method
  • Patent Title (中): 在半导体固体基板上修复铜扩散阻挡层的方法以及用于实施该方法的修理工具
  • Application No.: US13003451
    Application Date: 2009-09-07
  • Publication No.: US08524512B2
    Publication Date: 2013-09-03
  • Inventor: Vincent Mevellec
  • Applicant: Vincent Mevellec
  • Applicant Address: FR Massy
  • Assignee: Alchimer
  • Current Assignee: Alchimer
  • Current Assignee Address: FR Massy
  • Agency: Hamre, Schumann, Mueller & Larson, P.C.
  • Priority: FR0856012 20080908
  • International Application: PCT/EP2009/061527 WO 20090907
  • International Announcement: WO2010/026243 WO 20100311
  • Main IPC: H01L21/768
  • IPC: H01L21/768
Method for repairing copper diffusion barrier layers on a semiconductor solid substrate and repair kit for implementing this method
Abstract:
Method for repairing copper diffusion barrier layers on a semiconductor solid substrate and repair kit for implementing this method.One subject of the present invention is a method for repairing a surface of a substrate coated with a discontinuous copper diffusion barrier layer of a titanium-based material.According to the invention, this method comprises: a) the contacting of the surface with a suspension containing copper or copper alloy nanoparticles for a time of between 1 s and 15 min; and b) the contacting of the thus treated surface with a liquid solution having a pH of between 8.5 and 12 and containing: at least one metal salt, at least one reducing agent, at least one stabilizer at a temperature of between 50° C. and 90° C., preferably between 60° C. and 80° C., for a time of between 30 s and 10 min, preferably between 1 min and 5 min, in order to thus form a metallic film having a thickness of at least 50 nanometers re-establishing the continuity of the copper diffusion barrier layer.
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