Invention Grant
- Patent Title: Formation of multi-height MUGFET
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Application No.: US12909919Application Date: 2010-10-22
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Publication No.: US08524546B2Publication Date: 2013-09-03
- Inventor: Brent A. Anderson , Edward J. Nowak , Jed H. Rankin
- Applicant: Brent A. Anderson , Edward J. Nowak , Jed H. Rankin
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Riley, LLC
- Agent Richard M. Kotulak, Esq.
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L21/336 ; H01L27/088

Abstract:
A method and structure comprise a field effect transistor structure that includes a first rectangular fin structure and a second rectangular fin structure, both positioned on a substrate. The sides of the second rectangular fin structure are parallel to the sides of the first rectangular fin structure. Further, a trench insulator is positioned on the substrate and positioned between a side of the first rectangular fin structure and a side of the second rectangular fin structure. A gate conductor is positioned on the trench insulator, positioned over the sides and the top of the first rectangular fin structure, and positioned over the sides and the top of the second rectangular fin structure. The gate conductor runs perpendicular to the sides of the first rectangular fin structure and the sides of the second rectangular fin structure. Also, a gate insulator is positioned between the gate conductor and the first rectangular fin structure and between the gate conductor and the second rectangular fin structure. The gate conductor is positioned adjacent to a relatively larger portion of the sides of the second rectangular fin structure and is positioned adjacent to a relatively smaller portion of the sides of the first rectangular fin structure.
Public/Granted literature
- US20120098068A1 FORMATION OF MULTI-HEIGHT MUGFET Public/Granted day:2012-04-26
Information query
IPC分类: