Invention Grant
- Patent Title: Method of fabricating thin-film transistor substrate
- Patent Title (中): 制造薄膜晶体管基板的方法
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Application No.: US13191833Application Date: 2011-07-27
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Publication No.: US08524549B2Publication Date: 2013-09-03
- Inventor: Hyung-Jun Kim , Chang-Oh Jeong , Il-Yong Yoon
- Applicant: Hyung-Jun Kim , Chang-Oh Jeong , Il-Yong Yoon
- Applicant Address: KR Yongin
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2010-0082566 20100825
- Main IPC: H01L21/268
- IPC: H01L21/268

Abstract:
A method of fabricating a thin-film transistor (TFT) substrate includes forming a gate electrode on a substrate; forming an insulating film on the gate electrode; forming an amorphous semiconductor pattern on the insulating film; and forming a source electrode separated from a drain electrode on the amorphous semiconductor pattern; forming a light-concentrating layer, which includes a protrusion, on the amorphous semiconductor pattern, the source electrode, and the drain electrode; and crystallizing at least part of the amorphous semiconductor pattern by irradiating light to the protrusion of the light-concentrating layer.
Public/Granted literature
- US20120052638A1 METHOD OF FABRICATING THIN-FILM TRANSISTOR SUBSTRATE Public/Granted day:2012-03-01
Information query
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