Invention Grant
US08524560B2 Method of fabricating semiconductor device with vertical channel transistor
有权
制造具有垂直沟道晶体管的半导体器件的方法
- Patent Title: Method of fabricating semiconductor device with vertical channel transistor
- Patent Title (中): 制造具有垂直沟道晶体管的半导体器件的方法
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Application No.: US13708534Application Date: 2012-12-07
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Publication No.: US08524560B2Publication Date: 2013-09-03
- Inventor: Daeik Kim , HyeongSun Hong , Yoosang Hwang , Hyun-Woo Chung
- Applicant: Daeik Kim , HyeongSun Hong , Yoosang Hwang , Hyun-Woo Chung
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2010-0098120 20101008
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/44

Abstract:
A semiconductor memory device includes a semiconductor substrate, a semiconductor pillar extending from the semiconductor substrate, the semiconductor pillar comprising a first region, a second region, and a third region, the second region positioned between the first region and the third region, the third region positioned between the second region and the semiconductor substrate, immediately adjacent regions having different conductivity types, a first gate pattern disposed on the second region with a first insulating layer therebetween, and a second gate pattern disposed on the third region, wherein the second region is ohmically connected to the substrate by the second gate pattern.
Public/Granted literature
- US20130171783A1 METHOD OF FABRICATING SEMICONDUCTOR DEVICE WITH VERTICAL CHANNEL TRANSISTOR Public/Granted day:2013-07-04
Information query
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