Invention Grant
- Patent Title: Methods for the fabrication of integrated circuits including back-etching of raised conductive structures
- Patent Title (中): 用于制造包括凸起导电结构的背蚀刻的集成电路的方法
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Application No.: US13331951Application Date: 2011-12-20
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Publication No.: US08524566B2Publication Date: 2013-09-03
- Inventor: Stefan Flachowsky , Ricardo P. Mikalo , Jan Hoentschel
- Applicant: Stefan Flachowsky , Ricardo P. Mikalo , Jan Hoentschel
- Applicant Address: KY Grand Cayman
- Assignee: GlobalFoundries, Inc.
- Current Assignee: GlobalFoundries, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Embodiments of a method for fabricating an integrated circuit are provided. In one embodiment, the method includes producing a partially-completed semiconductor device including a substrate, source/drain (S/D) regions, a channel region between the S/D regions, and a gate stack over the channel region. At least one raised electrically-conductive structure is formed over at least one of the S/D regions and separated from the gate stack by a lateral gap. The raised electrically-conductive structure is then back-etched to increase the width of the lateral gap and reduce the parasitic fringing capacitance between the raised electrically-conductive structure and the gate stack during operation of the completed semiconductor device.
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