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US08524573B2 Method for separating a semiconductor layer from a substrate by irradiating with laser pulses 有权
通过照射激光脉冲从衬底分离半导体层的方法

Method for separating a semiconductor layer from a substrate by irradiating with laser pulses
Abstract:
A method for producing a semiconductor component, in which a semiconductor layer is separated from a substrate by irradiation with laser pulses, the pulse duration of the laser pulses being less than or equal to 10 ns. The laser pulses have a spatial beam profile with a flank slope is chosen to be gentle enough to prevent cracks in the semiconductor layer that arise as a result of thermally induced lateral stresses during the separation of semiconductor layer and substrate.
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