Invention Grant
- Patent Title: Method for separating a semiconductor layer from a substrate by irradiating with laser pulses
- Patent Title (中): 通过照射激光脉冲从衬底分离半导体层的方法
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Application No.: US10544306Application Date: 2004-01-27
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Publication No.: US08524573B2Publication Date: 2013-09-03
- Inventor: Stephan Kaiser , Volker Härle , Berthold Hahn
- Applicant: Stephan Kaiser , Volker Härle , Berthold Hahn
- Applicant Address: DE Regensburg
- Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee Address: DE Regensburg
- Agency: Cozen O'Connor
- Priority: DE10303977 20030131
- International Application: PCT/DE2004/000123 WO 20040127
- International Announcement: WO2004/068572 WO 20040812
- Main IPC: H01L21/428
- IPC: H01L21/428

Abstract:
A method for producing a semiconductor component, in which a semiconductor layer is separated from a substrate by irradiation with laser pulses, the pulse duration of the laser pulses being less than or equal to 10 ns. The laser pulses have a spatial beam profile with a flank slope is chosen to be gentle enough to prevent cracks in the semiconductor layer that arise as a result of thermally induced lateral stresses during the separation of semiconductor layer and substrate.
Public/Granted literature
- US20060246687A1 Method for producing a semiconductor component Public/Granted day:2006-11-02
Information query
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