Invention Grant
- Patent Title: Variable pixel density imaging
- Patent Title (中): 可变像素密度成像
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Application No.: US12854122Application Date: 2010-08-10
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Publication No.: US08525112B2Publication Date: 2013-09-03
- Inventor: Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele
- Applicant: Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Agency: McCarthy Law Group
- Agent Mitchell K. McCarthy
- Main IPC: H01J37/26
- IPC: H01J37/26

Abstract:
A method and associated apparatus for topographically characterizing a workpiece. The workpiece is scanned with a scanning probe along a first directional grid, thereby scanning a reference surface and an area of interest subportion of the reference surface, at a variable pixel density including a first pixel density outside the area of interest and a second pixel density inside the area of interest to derive a first digital file characterizing topography of the workpiece. The workpiece is further scanned along the reference surface and the area of interest with the scanning probe along a second directional grid that is substantially orthogonal to the first directional grid and at a constant pixel density to derive a second digital file characterizing topography of the workpiece. A processor executes computer-readable instructions stored in memory that generate a topographical profile of the workpiece in relation to the first and second digital files.
Public/Granted literature
- US20120042422A1 VARIABLE PIXEL DENSITY IMAGING Public/Granted day:2012-02-16
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