Invention Grant
- Patent Title: Method for creating S/TEM sample and sample structure
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Application No.: US12446404Application Date: 2007-10-22
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Publication No.: US08525137B2Publication Date: 2013-09-03
- Inventor: Jeff Blackwood , Stacey Stone , Jason Arjavac
- Applicant: Jeff Blackwood , Stacey Stone , Jason Arjavac
- Applicant Address: US OR Hillsboro
- Assignee: Fei Company
- Current Assignee: Fei Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg; Ki O
- International Application: PCT/US2007/082163 WO 20071022
- International Announcement: WO2008/049133 WO 20080424
- Main IPC: G21K5/00
- IPC: G21K5/00
Abstract:
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
Public/Granted literature
- US20100308219A1 METHOD FOR CREATING S/TEM SAMPLE AND SAMPLE STRUCTURE Public/Granted day:2010-12-09
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