Invention Grant
- Patent Title: Transistor with buried fins
- Patent Title (中): 晶体管埋地鳍
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Application No.: US13081509Application Date: 2011-04-07
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Publication No.: US08525262B2Publication Date: 2013-09-03
- Inventor: Tieh-Chiang Wu , Yi-Nan Chen , Hsien-Wen Liu
- Applicant: Tieh-Chiang Wu , Yi-Nan Chen , Hsien-Wen Liu
- Applicant Address: TW Kueishan, Tao-Yuan Hsien
- Assignee: Nanya Technology Corp.
- Current Assignee: Nanya Technology Corp.
- Current Assignee Address: TW Kueishan, Tao-Yuan Hsien
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
The present invention disclosed a recessed gate transistor with buried fins. The recessed gate transistor with buried fins is disposed in an active region on a semiconductor substrate. Two isolation regions disposed in the semiconductor substrate, and sandwich the active region. A gate structure is disposed in the semiconductor substrate, wherein the gate structure includes: an upper part and a lower part. The upper part is disposed in the active region and a lower part having a front fin disposed in one of the two isolation regions, at least one middle fin disposed in the active region, and a last fin disposed in the other one of the two isolation regions, wherein the front fin are both elliptic cylindrical.
Public/Granted literature
- US20120256257A1 TRANSISTOR WITH BURIED FINS Public/Granted day:2012-10-11
Information query
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