Invention Grant
US08525298B2 Phase change memory device having 3 dimensional stack structure and fabrication method thereof 有权
具有三维堆叠结构的相变存储器件及其制造方法

  • Patent Title: Phase change memory device having 3 dimensional stack structure and fabrication method thereof
  • Patent Title (中): 具有三维堆叠结构的相变存储器件及其制造方法
  • Application No.: US12782853
    Application Date: 2010-05-19
  • Publication No.: US08525298B2
    Publication Date: 2013-09-03
  • Inventor: Ki Ho Yang
  • Applicant: Ki Ho Yang
  • Applicant Address: KR Gyeonggi-do
  • Assignee: Hynix Semiconductor Inc.
  • Current Assignee: Hynix Semiconductor Inc.
  • Current Assignee Address: KR Gyeonggi-do
  • Agency: Ladas & Parry LLP
  • Priority: KR10-2009-0128785 20091222
  • Main IPC: H01L29/00
  • IPC: H01L29/00
Phase change memory device having 3 dimensional stack structure and fabrication method thereof
Abstract:
A phase change memory device having a 3-D stack structure and a fabrication method for making the same are presented. The phase change memory device includes a semiconductor substrate, a word line structure and one or more phase change structures. The word line structure extends in one first direction on the semiconductor substrate. The one or more phase change structures extend mutually in parallel from one sidewall of the word line structure. The, the memory cell including a switching device, one side of the switching device contacted with the one sidewall of the word line structure, a heating electrode formed on the other side portion of the switching device, and a phase change pattern, one sidewall of the phase change pattern contacted with the heating electrode.
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