Invention Grant
US08525344B2 Semiconductor device and method of forming bond wires between semiconductor die contact pads and conductive TOV in peripheral area around semiconductor die
有权
半导体器件和在半导体管芯接触焊盘之间形成接合线的方法和在半导体管芯周围的周边区域中的导电TOV
- Patent Title: Semiconductor device and method of forming bond wires between semiconductor die contact pads and conductive TOV in peripheral area around semiconductor die
- Patent Title (中): 半导体器件和在半导体管芯接触焊盘之间形成接合线的方法和在半导体管芯周围的周边区域中的导电TOV
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Application No.: US13034075Application Date: 2011-02-24
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Publication No.: US08525344B2Publication Date: 2013-09-03
- Inventor: Reza A. Pagaila , Byung Tai Do , Dioscoro A. Merilo
- Applicant: Reza A. Pagaila , Byung Tai Do , Dioscoro A. Merilo
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Atkins & Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L29/40
- IPC: H01L29/40

Abstract:
A semiconductor wafer has a plurality of semiconductor die with contact pads. An organic material is deposited in a peripheral region around the semiconductor die. A portion of the organic material is removed to form a plurality of vias. A conductive material is deposited in the vias to form conductive TOV. The conductive TOV can be recessed with respect to a surface of the semiconductor die. Bond wires are formed between the contact pads and conductive TOV. The bond wires can be bridged in multiple sections across the semiconductor die between the conductive TOV and contact pads. An insulating layer is formed over the bond wires and semiconductor die. The semiconductor wafer is singulated through the conductive TOV or organic material between the conductive TOV to separate the semiconductor die. A plurality of semiconductor die can be stacked and electrically connected through the bond wires and conductive TOV.
Public/Granted literature
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