Invention Grant
- Patent Title: Microspring structures adapted for target device cooling
- Patent Title (中): 适用于目标器件冷却的微弹簧结构
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Application No.: US13330316Application Date: 2011-12-19
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Publication No.: US08525353B2Publication Date: 2013-09-03
- Inventor: Eugene M. Chow , Eric J. Shrader , John S. Paschkewitz
- Applicant: Eugene M. Chow , Eric J. Shrader , John S. Paschkewitz
- Applicant Address: US CA Palo Alto
- Assignee: Palo Alto Research Center Incorporated
- Current Assignee: Palo Alto Research Center Incorporated
- Current Assignee Address: US CA Palo Alto
- Agent Jonathan A. Small
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
In a system for providing temporary or permanent connection of an integrated circuit die to a base substrate using electrical microsprings, a thermal element is provided that assists with cooling of the pad structure during use. The thermal element may be formed of the same material and my similar processes as the microsprings. The thermal element may be one or more block structures or one or more thermal microsprings. The thermal element may be provided with channels to contain and/or direct the flow of a thermal transfer fluid. Cooling of components associated with the pad structure (e.g., ICs) may be provided.
Public/Granted literature
- US20130154127A1 Microspring Structures Adapted for Target Device Cooling Public/Granted day:2013-06-20
Information query
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