Invention Grant
- Patent Title: Refractive index distribution measuring method and refractive index distribution measuring apparatus
- Patent Title (中): 折射率分布测量方法和折射率分布测量装置
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Application No.: US13114309Application Date: 2011-05-24
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Publication No.: US08525982B2Publication Date: 2013-09-03
- Inventor: Seima Kato
- Applicant: Seima Kato
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-119636 20100525
- Main IPC: G01N21/41
- IPC: G01N21/41 ; G01B9/00

Abstract:
A method includes the steps of measuring a first transmitted wavefront in a first medium having a first refractive index and a second transmitted wavefront in a second medium having a second refractive index different from the first refractive index, and obtaining a refractive index distribution projected value of the object in each orientation by removing a shape component of the object utilizing measurement results of the first transmitted wavefront and the second transmitted wavefront and each transmitted wavefront of a reference object that has the same shape as that of the object and a specific refractive index distribution and is located in one of the first medium and the second medium with the same orientation as that of the object, and calculating a three-dimensional refractive index distribution of the object based on a plurality of refractive index distribution projected values corresponding to the plurality of orientations.
Public/Granted literature
- US20110292379A1 REFRACTIVE INDEX DISTRIBUTION MEASURING METHOD AND REFRACTIVE INDEX DISTRIBUTION MEASURING APPARATUS Public/Granted day:2011-12-01
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