Invention Grant
- Patent Title: Fiber optic probe scatterometers for spectroscopy measurements
- Patent Title (中): 用于光谱测量的光纤探头散射仪
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Application No.: US13416771Application Date: 2012-03-09
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Publication No.: US08525990B2Publication Date: 2013-09-03
- Inventor: Stephen K. Wilcken
- Applicant: Stephen K. Wilcken
- Applicant Address: US IL Chicago
- Assignee: The Boeing Company
- Current Assignee: The Boeing Company
- Current Assignee Address: US IL Chicago
- Agency: Hanley, Flight & Zimmerman, LLC
- Main IPC: G01J3/28
- IPC: G01J3/28

Abstract:
Fiber optic probe scatterometers for spectroscopy measurements are disclosed. An example device includes an optically transparent illumination tube, an opaque tube, an inner surface of the opaque tube being adjacent an outer surface of the illumination tube and the illumination tube being disposed within the opaque tube, and an optical fiber disposed within and spaced a first distance from the illumination tube, wherein the opaque tube is to be coupled to a spectrometer and an illumination source to provide a light signal along the illumination tube and to collect a scattered light signal via the optical fiber for the spectrometer.
Public/Granted literature
- US20120170026A1 FIBER OPTIC PROBE SCATTEROMETERS FOR SPECTROSCOPY MEASUREMENTS Public/Granted day:2012-07-05
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