Invention Grant
US08525994B2 Periodic patterns and technique to control misaligment between two layers
有权
周期性模式和技术来控制两层之间的错配
- Patent Title: Periodic patterns and technique to control misaligment between two layers
- Patent Title (中): 周期性模式和技术来控制两层之间的错配
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Application No.: US12428401Application Date: 2009-04-22
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Publication No.: US08525994B2Publication Date: 2013-09-03
- Inventor: Ibrahim Abdulhalim , Mike Adel , Michael Friedmann , Michael Faeyrman
- Applicant: Ibrahim Abdulhalim , Mike Adel , Michael Friedmann , Michael Faeyrman
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Davis Wright Tremaine LLP
- Main IPC: G01B11/00
- IPC: G01B11/00
Abstract:
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
Public/Granted literature
- US20090231584A1 PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGMENT BETWEEN TWO LAYERS Public/Granted day:2009-09-17
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