Invention Grant
- Patent Title: Microsystem and method for the production of a microsystem
- Patent Title (中): 用于生产微系统的微系统和方法
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Application No.: US12669333Application Date: 2008-07-10
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Publication No.: US08526098B2Publication Date: 2013-09-03
- Inventor: Ulrich Hofmann , Hans-Joachim Quenzer , Marten Oldsen
- Applicant: Ulrich Hofmann , Hans-Joachim Quenzer , Marten Oldsen
- Applicant Address: DE
- Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Current Assignee Address: DE
- Agency: Schwegman Lundberg & Woessner, P.A.
- Priority: DE102007034888 20070716
- International Application: PCT/EP2008/006070 WO 20080710
- International Announcement: WO2009/010309 WO 20090122
- Main IPC: G02B26/00
- IPC: G02B26/00

Abstract:
The invention relates to a microsystem having at least one micromirror (1) and at least one micromirror actuator (2) for pivoting the at least one micromirror (1) about at least one axis from a relaxed resting position, comprising a frame chip and a transparent cover (3) disposed on the frame chip, wherein the frame chip has a chip frame (10), on which the at least one micromirror (1) is articulated in an elastically pivoting manner, wherein the at least one micromirror (1) is further disposed within the chip frame (10) and in a cavity (11) that is formed between the transparent cover (3) and a carrier layer. To this end, the at least one micromirror (1) is articulated on a frame (14) pivotally about the at least one axis, the frame (14) in turn being pivotally articulated on the chip frame (10), wherein the frame (14) is permanently pivoted out of a chip plane defined by the carrier layer such that the micromirror (1) in the resting position thereof is tilted about a non-pivoting angle relative to the chip plane. The invention further relates to a method for the production of such a microsystem.
Public/Granted literature
- US20100296151A1 MICROSYSTEM AND METHOD FOR THE PRODUCTION OF A MICROSYSTEM Public/Granted day:2010-11-25
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