Invention Grant
US08526167B2 Porous amorphous silicon-carbon nanotube composite based electrodes for battery applications
有权
用于电池应用的多孔非晶硅 - 碳纳米管复合材料电极
- Patent Title: Porous amorphous silicon-carbon nanotube composite based electrodes for battery applications
- Patent Title (中): 用于电池应用的多孔非晶硅 - 碳纳米管复合材料电极
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Application No.: US12868230Application Date: 2010-08-25
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Publication No.: US08526167B2Publication Date: 2013-09-03
- Inventor: Victor L. Pushparaj , Omkaram Nalamasu , Steven Verhaverbeke
- Applicant: Victor L. Pushparaj , Omkaram Nalamasu , Steven Verhaverbeke
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01L29/92
- IPC: H01L29/92 ; H01L21/02 ; C25D17/00 ; B05C1/00
Abstract:
Embodiments of the present invention generally relate to methods and apparatus for forming an energy storage device. More particularly, embodiments described herein relate to methods of forming electric batteries and electrochemical capacitors. In one embodiment a method of forming a high surface area electrode for use in an energy storage device is provided. The method comprises forming an amorphous silicon layer on a current collector having a conductive surface, immersing the amorphous silicon layer in an electrolytic solution to form a series of interconnected pores in the amorphous silicon layer, and forming carbon nanotubes within the series of interconnected pores of the amorphous silicon layer.
Public/Granted literature
- US20110051322A1 POROUS AMORPHOUS SILICON-CARBON NANOTUBE COMPOSITE BASED ELECTRODES FOR BATTERY APPLICATIONS Public/Granted day:2011-03-03
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