Invention Grant
- Patent Title: Extendable electrode for gas discharge laser
- Patent Title (中): 气体放电激光可扩展电极
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Application No.: US13469009Application Date: 2012-05-10
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Publication No.: US08526481B2Publication Date: 2013-09-03
- Inventor: Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
- Applicant: Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
- Applicant Address: US CA San Diego
- Assignee: CYMER, Inc.
- Current Assignee: CYMER, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Martine Penilla Group, LLP
- Main IPC: H01S3/097
- IPC: H01S3/097

Abstract:
A movable electrode assembly for use in a laser system, includes a first electrode having a first discharge surface, a second electrode having a second discharge surface. The second electrode being arranged opposite from the first electrode. The second discharge surface being spaced apart from the first discharge surface by a discharge gap. A discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A method of adjusting a discharge gap is also disclosed.
Public/Granted literature
- US20120219032A1 EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER Public/Granted day:2012-08-30
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