Invention Grant
US08527080B2 Method and system for managing process jobs in a semiconductor fabrication facility
有权
用于管理半导体制造设备中的工艺工作的方法和系统
- Patent Title: Method and system for managing process jobs in a semiconductor fabrication facility
- Patent Title (中): 用于管理半导体制造设备中的工艺工作的方法和系统
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Application No.: US12244735Application Date: 2008-10-02
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Publication No.: US08527080B2Publication Date: 2013-09-03
- Inventor: Shay Assaf , Venkatesh Babu , Robert D. Flores , Brendan Hickey , Krishna Kuttannair , Song J. Park , Adrian Rhee , Chongyang Chris Wang
- Applicant: Shay Assaf , Venkatesh Babu , Robert D. Flores , Brendan Hickey , Krishna Kuttannair , Song J. Park , Adrian Rhee , Chongyang Chris Wang
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor and Zafman, LLP
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
A method and system for managing process jobs in a semiconductor fabrication facility is described. In one embodiment, the method includes receiving a plurality of process jobs associated with one or more priorities. The method further includes executing the plurality of process jobs in an order reflecting the priorities. The order is modifiable in real time upon receiving a new process job with a priority higher than the priorities of the plurality of process jobs.
Public/Granted literature
- US20100087941A1 METHOD AND SYSTEM FOR MANAGING PROCESS JOBS IN A SEMICONDUCTOR FABRICATION FACILITY Public/Granted day:2010-04-08
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