Invention Grant
- Patent Title: Displacement detection apparatus and method of correcting error of scale used for displacement detection apparatus
- Patent Title (中): 位移检测装置和校正误差的方法,用于位移检测装置
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Application No.: US13111103Application Date: 2011-05-19
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Publication No.: US08527236B2Publication Date: 2013-09-03
- Inventor: Shinichiro Takahama , Masahiko Igaki , Yasuyuki Miyaoka , Yasumichi Arimitsu
- Applicant: Shinichiro Takahama , Masahiko Igaki , Yasuyuki Miyaoka , Yasumichi Arimitsu
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-009828 20100120; JP2011-008424 20110119
- Main IPC: G01C9/00
- IPC: G01C9/00 ; G06F11/30

Abstract:
A displacement detection apparatus includes a scale 115 on which marks are disposed, first and second position detection sensors 111 and 112 detecting positions of the marks 110, and a processor 409 performing a calculation processing of an output signal from each of the first and second position detection sensors 111 and 112. The first and second position detection sensors 111 and 112 are disposed at a distance L from each other to be movable relative to the scale 115. The processor 409 calculates a correction value P′ of a mark pitch P of the marks 110 using the distance L, a first time TPK required for K marks of the marks 110 to pass a detection position, and a second time TL required for a specific mark of the marks 110, which are measured at the same time of the first time TPK, to move the distance L.
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