Invention Grant
US08527236B2 Displacement detection apparatus and method of correcting error of scale used for displacement detection apparatus 有权
位移检测装置和校正误差的方法,用于位移检测装置

Displacement detection apparatus and method of correcting error of scale used for displacement detection apparatus
Abstract:
A displacement detection apparatus includes a scale 115 on which marks are disposed, first and second position detection sensors 111 and 112 detecting positions of the marks 110, and a processor 409 performing a calculation processing of an output signal from each of the first and second position detection sensors 111 and 112. The first and second position detection sensors 111 and 112 are disposed at a distance L from each other to be movable relative to the scale 115. The processor 409 calculates a correction value P′ of a mark pitch P of the marks 110 using the distance L, a first time TPK required for K marks of the marks 110 to pass a detection position, and a second time TL required for a specific mark of the marks 110, which are measured at the same time of the first time TPK, to move the distance L.
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