Invention Grant
- Patent Title: Pressure sensor using gas/liquid interface
- Patent Title (中): 使用气/液界面的压力传感器
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Application No.: US13270114Application Date: 2011-10-10
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Publication No.: US08528383B2Publication Date: 2013-09-10
- Inventor: Allan T. Evans , Jonathan D. Suter , Jacob M. Fricke , Rebecca L. Erikson
- Applicant: Allan T. Evans , Jonathan D. Suter , Jacob M. Fricke , Rebecca L. Erikson
- Applicant Address: US WA Richland
- Assignee: Battelle Memorial Institute
- Current Assignee: Battelle Memorial Institute
- Current Assignee Address: US WA Richland
- Agent A. J. Gokcek
- Main IPC: G01N7/00
- IPC: G01N7/00 ; G01N9/00 ; G01N19/00

Abstract:
A pressure sensor and method of sensing pressure is disclosed. An fluid port is coupled to a substrate. A first microchannel within the substrate is in fluid communication with the fluid port. The first microchannel includes a first compressible fluid, a first incompressible fluid and at least one first meniscus. A second microchannel within the substrate is in fluid communication with the fluid port. The second microchannel includes a second compressible fluid, a second incompressible fluid and at least one second meniscus. A pressure of the first meniscus and/or the second meniscus is determined.
Public/Granted literature
- US20130086988A1 PRESSURE SENSOR USING GAS/LIQUID INTERFACE Public/Granted day:2013-04-11
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