Invention Grant
US08528383B2 Pressure sensor using gas/liquid interface 有权
使用气/液界面的压力传感器

Pressure sensor using gas/liquid interface
Abstract:
A pressure sensor and method of sensing pressure is disclosed. An fluid port is coupled to a substrate. A first microchannel within the substrate is in fluid communication with the fluid port. The first microchannel includes a first compressible fluid, a first incompressible fluid and at least one first meniscus. A second microchannel within the substrate is in fluid communication with the fluid port. The second microchannel includes a second compressible fluid, a second incompressible fluid and at least one second meniscus. A pressure of the first meniscus and/or the second meniscus is determined.
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