Invention Grant
- Patent Title: Hermeticity sensor and related method
- Patent Title (中): 密封传感器及相关方法
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Application No.: US12858961Application Date: 2010-08-18
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Publication No.: US08528397B2Publication Date: 2013-09-10
- Inventor: Anthony K. Stamper
- Applicant: Anthony K. Stamper
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Richard M. Kotulak
- Main IPC: G01L5/00
- IPC: G01L5/00
Abstract:
A hermeticity sensor for a device includes a beam positioned within a substantially hermetically sealed cavity. The beam includes a stress that changes in response to being exposed to ambient from outside the cavity. A related method is also provided.
Public/Granted literature
- US20120042714A1 HERMETICITY SENSOR AND RELATED METHOD Public/Granted day:2012-02-23
Information query
