Invention Grant
US08528402B2 Micromechanical component having a volume-elastic medium 有权
具有体积弹性介质的微机械部件

Micromechanical component having a volume-elastic medium
Abstract:
A method for manufacturing a micromechanical component is described, the micromechanical component having a medium. The medium has settable and changeable volume-elastic properties and generally completely encloses a sensor module and/or a module housing. The medium preferably has a low-pass response.
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