Invention Grant
US08529130B2 Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application
有权
空气静力轴承布置和相关的静电预压单元，特别适用于真空应用
- Patent Title: Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application
- Patent Title (中): 空气静力轴承布置和相关的静电预压单元，特别适用于真空应用
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Application No.: US12553340Application Date: 2009-09-03
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Publication No.: US08529130B2Publication Date: 2013-09-10
- Inventor: Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
- Applicant: Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
- Applicant Address: DE Jena
- Assignee: Vistec Electron Beam GmbH
- Current Assignee: Vistec Electron Beam GmbH
- Current Assignee Address: DE Jena
- Agency: Patentbar International P.C.
- Priority: DE102008046636 20080909
- Main IPC: F16C17/00
- IPC: F16C17/00 ; F16C32/06
Abstract:
A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.
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