Invention Grant
US08529460B2 Measuring apparatus 有权
测量装置

Measuring apparatus
Abstract:
Provided is a measuring apparatus including: a driving unit that outputs first and second driving signals each having an opposite phase; a first semiconductor laser device, driven by the first driving signal, that emits a first laser beam to an object to be measured; a second semiconductor laser device, disposed near the first device and driven by the second driving signal, that emits a second laser beam to the object; a first detection unit that detects a first electrical signal that corresponds to the intensity of the first laser beam modulated due to the self-coupling effect; a second detection unit that detects a second electrical signal that corresponds to the intensity of the second laser beam modulated due to the self-coupling effect; a calculation unit that calculates differences between the first and second electrical signals; and a measuring unit that measures a state change of the object from the difference.
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