Invention Grant
US08529802B2 Solution composition and method of forming thin film and method of manufacturing thin film transistor using the solution composition 有权
溶液组成和薄膜形成方法以及使用该溶液组合物制造薄膜晶体管的方法

Solution composition and method of forming thin film and method of manufacturing thin film transistor using the solution composition
Abstract:
Disclosed is a solution composition for forming a thin film transistor including a zinc-containing compound, an indium-containing compound, and a compound including at least one metal or metalloid selected from the group consisting of hafnium (Hf), magnesium (Mg), tantalum (Ta), cerium (Ce), lanthanum (La), silicon (Si), germanium (Ge), vanadium (V), niobium (Nb), and yttrium (Y). A method of forming a thin film by using the solution composition, and a method of manufacturing thin film transistor including the thin film are also disclosed.
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