Invention Grant
- Patent Title: Solution composition and method of forming thin film and method of manufacturing thin film transistor using the solution composition
- Patent Title (中): 溶液组成和薄膜形成方法以及使用该溶液组合物制造薄膜晶体管的方法
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Application No.: US12656682Application Date: 2010-02-12
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Publication No.: US08529802B2Publication Date: 2013-09-10
- Inventor: Jong-Baek Seon , Sang-Yoon Lee , Jeong-il Park , Myung-Kwan Ryu , Kyung-Bae Park
- Applicant: Jong-Baek Seon , Sang-Yoon Lee , Jeong-il Park , Myung-Kwan Ryu , Kyung-Bae Park
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2009-0011894 20090213; KR10-2010-0007951 20100128
- Main IPC: H01B1/02
- IPC: H01B1/02 ; H01B1/06 ; H01B1/12 ; H01L21/44

Abstract:
Disclosed is a solution composition for forming a thin film transistor including a zinc-containing compound, an indium-containing compound, and a compound including at least one metal or metalloid selected from the group consisting of hafnium (Hf), magnesium (Mg), tantalum (Ta), cerium (Ce), lanthanum (La), silicon (Si), germanium (Ge), vanadium (V), niobium (Nb), and yttrium (Y). A method of forming a thin film by using the solution composition, and a method of manufacturing thin film transistor including the thin film are also disclosed.
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