Invention Grant
- Patent Title: Apparatus for producing trichlorosilane and method for producing trichlorosilane
- Patent Title (中): 三氯硅烷的制造装置及三氯硅烷的制造方法
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Application No.: US13345864Application Date: 2012-01-09
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Publication No.: US08529844B2Publication Date: 2013-09-10
- Inventor: Toshiyuki Ishii , Eiji Komai , Harumi Satoh
- Applicant: Toshiyuki Ishii , Eiji Komai , Harumi Satoh
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Materials Corporation
- Current Assignee: Mitsubishi Materials Corporation
- Current Assignee Address: JP Tokyo
- Agency: Edwards Wildman Palmer LLP
- Priority: JP2008-201863 20080805
- Main IPC: B01J19/00
- IPC: B01J19/00 ; C01B33/107

Abstract:
An apparatus for producing trichlorosilane includes: a decomposing furnace, a heating unit heating the inside of the decomposing furnace, a raw material supplying tube for guiding polymer and hydrogen chloride to be guided to the inner bottom portion of the decomposing furnace, and a gas discharge tube for discharging reaction gas from the top of the reaction chamber provided between the outer peripheral surface of the raw material supplying tube and the inner peripheral surface of the decomposing furnace, a fin, which guides a fluid mixture of the polymer and the hydrogen chloride supplied from the lower end opening of the raw material supplying tube to be agitated and rise upward in the reaction chamber, and is formed integrally with at least one of the outer peripheral surface of the raw material supplying tube and the inner peripheral surface of the decomposing furnace.
Public/Granted literature
- US20120107190A1 APPARATUS FOR PRODUCING TRICHLOROSILANE AND METHOD FOR PRODUCING TRICHLOROSILANE Public/Granted day:2012-05-03
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