Invention Grant
- Patent Title: Method for fabrication of localized plasmon transducers
- Patent Title (中): 局部等离子体激元换能器的制造方法
-
Application No.: US12988067Application Date: 2009-04-07
-
Publication No.: US08529988B2Publication Date: 2013-09-10
- Inventor: Israel Rubinstein , Alexander Vaskevich , Tatyana Karakouz
- Applicant: Israel Rubinstein , Alexander Vaskevich , Tatyana Karakouz
- Applicant Address: IL Rehovot
- Assignee: Yeda Research and Development Company Ltd.
- Current Assignee: Yeda Research and Development Company Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Browdy and Neimark, PLLC
- International Application: PCT/IL2009/000404 WO 20090407
- International Announcement: WO2009/128067 WO 20091022
- Main IPC: C23C16/06
- IPC: C23C16/06

Abstract:
A method is presented for use in fabrication of metal islands on an oxide substrate. The method comprises: depositing a selected metal on the oxide substrate by evaporation of said selected metal; and annealing a film of the selected metal on said substrate at temperatures including an annealing temperature being less than 50° C. lower than a glass transition temperature, thereby forming the metal islands partially embedded in said substrate.
Public/Granted literature
- US20110033666A1 LOCALIZED PLASMON TRANSDUCERS AND METHODS OF FABRICATION THEREOF Public/Granted day:2011-02-10
Information query
IPC分类: