Invention Grant
- Patent Title: Process for producing photoresist polymeric compounds
- Patent Title (中): 光致抗蚀剂聚合物的制备方法
-
Application No.: US12781866Application Date: 2010-05-18
-
Publication No.: US08530134B2Publication Date: 2013-09-10
- Inventor: Tadashi Teranishi
- Applicant: Tadashi Teranishi
- Applicant Address: JP Osaka-shi
- Assignee: Daicel Chemical Industries, Ltd.
- Current Assignee: Daicel Chemical Industries, Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2009-121444 20090519
- Main IPC: G03F7/00
- IPC: G03F7/00 ; C08F10/00 ; C08F32/08

Abstract:
Disclosed is a process for producing a photoresist polymeric compound. The process includes the steps of polymerizing a monomer mixture containing at least one monomer selected from a monomer (a) containing a group capable of leaving with an acid to allow the polymeric compound to be soluble in an alkali, a monomer (b) having a lactone skeleton, and a monomer (c) having a hydroxyl-containing alicyclic skeleton, to give a polymer; passing a solution containing the polymer through a filter including a porous membrane having an anion-exchange group to give a polymer solution; and thereafter passing the polymer solution through a filter including a porous membrane having a cation-exchange group. The polymer solution before passing through the filter including a porous membrane having a cation-exchange group preferably has a content of metals of 1000 ppb by weight or less per the weight of the polymer.
Public/Granted literature
- US20100297551A1 PROCESS FOR PRODUCING PHOTORESIST POLYMERIC COMPOUNDS Public/Granted day:2010-11-25
Information query