Invention Grant
US08530266B1 Image sensor having metal grid with a triangular cross-section 有权
具有三角形横截面的金属栅格的图像传感器

Image sensor having metal grid with a triangular cross-section
Abstract:
A backside illuminated image sensor includes a substrate layer having a frontside and a backside. An array of photosensitive pixels is disposed within the substrate layer and is sensitive to light incident through the backside of the substrate layer. A metal grid is disposed over the backside of the substrate layer. The metal grid surrounds each of the photosensitive pixels and defines optical apertures for receiving the light into the photosensitive pixels through the backside. The metal grid includes intersecting wires each having a triangular cross-section. A material layer surrounds the metal grid.
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