Invention Grant
- Patent Title: Image sensor having metal grid with a triangular cross-section
- Patent Title (中): 具有三角形横截面的金属栅格的图像传感器
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Application No.: US13552330Application Date: 2012-07-18
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Publication No.: US08530266B1Publication Date: 2013-09-10
- Inventor: Gang Chen , Duli Mao , Hsin-Chih Tai
- Applicant: Gang Chen , Duli Mao , Hsin-Chih Tai
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/44 ; H01L21/48 ; H01L21/50 ; H01L31/062 ; H01L31/113 ; H01L31/0232 ; H01L31/00 ; H01L23/04

Abstract:
A backside illuminated image sensor includes a substrate layer having a frontside and a backside. An array of photosensitive pixels is disposed within the substrate layer and is sensitive to light incident through the backside of the substrate layer. A metal grid is disposed over the backside of the substrate layer. The metal grid surrounds each of the photosensitive pixels and defines optical apertures for receiving the light into the photosensitive pixels through the backside. The metal grid includes intersecting wires each having a triangular cross-section. A material layer surrounds the metal grid.
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