Invention Grant
US08530281B2 Production method of semiconductor module with resin-molded assembly of heat spreader and semiconductor chip
有权
具有散热器和半导体芯片的树脂模制组件的半导体模块的制造方法
- Patent Title: Production method of semiconductor module with resin-molded assembly of heat spreader and semiconductor chip
- Patent Title (中): 具有散热器和半导体芯片的树脂模制组件的半导体模块的制造方法
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Application No.: US13167140Application Date: 2011-06-23
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Publication No.: US08530281B2Publication Date: 2013-09-10
- Inventor: Chikage Noritake , Tsuyoshi Arai , Naoki Hiraiwa
- Applicant: Chikage Noritake , Tsuyoshi Arai , Naoki Hiraiwa
- Applicant Address: JP Kariya
- Assignee: Denso Corporation
- Current Assignee: Denso Corporation
- Current Assignee Address: JP Kariya
- Agency: Nixon & Vanderhye P.C.
- Priority: JP2010-143059 20100623
- Main IPC: H01L21/50
- IPC: H01L21/50

Abstract:
A method of producing a semiconductor module which includes a resin molded package and a coolant passage is provided. The resin molded package is made up of a thermosetting resin-made mold and a thermoplastic resin-made mold. The resin molded package is formed by making the thermoplastic resin-made mold, placing the thermoplastic resin-made mold and a semiconductor sub-assembly made up of a power semiconductor chip, heat spreaders, terminals, etc., and then forming the thermosetting resin-made mold. Specifically, the thermosetting resin-made mold is made after the thermoplastic resin-made mold, thereby creating a high degree of adhesion of the thermosetting resin-made mold to the thermoplastic resin-made mold before the thermosetting resin-made mold is hardened completely, thereby forming firmly an adhered interface between the thermosetting resin-made mold and the thermoplastic resin-made mold. This minimizes the risk of occurrence of air gaps at the adhered interface and avoids the leakage of the coolant outside the resin molded package.
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