Invention Grant
- Patent Title: Method for manufacturing display device
- Patent Title (中): 显示装置制造方法
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Application No.: US13144380Application Date: 2009-08-17
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Publication No.: US08530291B2Publication Date: 2013-09-10
- Inventor: Makoto Kita
- Applicant: Makoto Kita
- Applicant Address: JP Osaka
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Osaka
- Agency: Chen Yoshimura LLP
- Priority: JP2009-019375 20090130
- International Application: PCT/JP2009/003914 WO 20090817
- International Announcement: WO2010/086920 WO 20100805
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
Exposure is performed by controlling an exposure amount applied to a photosensitive resin 23 arranged on a metal film 22, and development is performed to the photosensitive resin 23, and thus a resist 25 provided with an edge section 25b having a tilted surface 25a having a tilt angle α of at least 20° but no more than 60° is formed. Then, a metal wiring is formed by etching the metal film 22 by using the resist 25 as a mask.
Public/Granted literature
- US20110287565A1 METHOD FOR MANUFACTURING DISPLAY DEVICE Public/Granted day:2011-11-24
Information query
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