Invention Grant
- Patent Title: Memory device and method for fabricating the same
- Patent Title (中): 存储器件及其制造方法
-
Application No.: US13597141Application Date: 2012-08-28
-
Publication No.: US08530309B2Publication Date: 2013-09-10
- Inventor: Nam-Jae Lee
- Applicant: Nam-Jae Lee
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: KR10-2008-0083988 20080827
- Main IPC: H01L21/8247
- IPC: H01L21/8247

Abstract:
A method for forming a memory device includes: forming a tunnel insulation layer, a conductive layer for a floating gate electrode, a charge blocking layer and a conductive layer for a control gate electrode over a substrate; and selectively etching the conductive layer for the control gate electrode, the charge blocking layer and the conductive layer for the floating gate electrode, thereby forming a plurality of gate lines, a plurality of select lines and at least two dummy lines disposed in a gap region between adjacent select lines, wherein the gate lines, the select lines and the dummy lines together construct strings.
Public/Granted literature
- US20120319186A1 MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2012-12-20
Information query