Invention Grant
- Patent Title: Solid-state memory manufacturing method
- Patent Title (中): 固态存储器制造方法
-
Application No.: US12998482Application Date: 2009-09-28
-
Publication No.: US08530314B2Publication Date: 2013-09-10
- Inventor: Junji Tominaga , Takayuki Shima , Alexander Kolobov , Paul Fons , Robert Simpson , Reiko Kondo
- Applicant: Junji Tominaga , Takayuki Shima , Alexander Kolobov , Paul Fons , Robert Simpson , Reiko Kondo
- Applicant Address: JP Tokyo
- Assignee: National Institute of Advanced Industrial Science and Technology
- Current Assignee: National Institute of Advanced Industrial Science and Technology
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2008-280134 20081030
- International Application: PCT/JP2009/004938 WO 20090928
- International Announcement: WO2010/050118 WO 20100506
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method of at least one embodiment of the present invention of manufacturing a solid-state memory is a method of manufacturing a solid-state memory, the solid-state memory including a recording film whose electric characteristics are varied by phase transformation, the method including: forming the recording film by forming a laminate of two or more layers so that a superlattice structure is provided, each of the layers having a parent phase which shows solid-to-solid phase-transformation, the recording film being formed at a temperature not lower than a temperature highest among crystallization temperatures of the parent phases. It is thus possible to manufacture a solid-state memory which requires lower current for recording and erasing data and has a greater rewriting cycle number.
Public/Granted literature
- US20110207284A1 SOLID-STATE MEMORY MANUFACTURING METHOD Public/Granted day:2011-08-25
Information query
IPC分类: