Invention Grant
US08530856B2 Beam device system comprising a particle beam device and an optical microscope
有权
光束装置系统,包括粒子束装置和光学显微镜
- Patent Title: Beam device system comprising a particle beam device and an optical microscope
- Patent Title (中): 光束装置系统,包括粒子束装置和光学显微镜
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Application No.: US12734613Application Date: 2008-11-11
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Publication No.: US08530856B2Publication Date: 2013-09-10
- Inventor: Bernd Spruck , Martin Edelmann , John Craven , Robert Taylor , Martin Kühner
- Applicant: Bernd Spruck , Martin Edelmann , John Craven , Robert Taylor , Martin Kühner
- Applicant Address: GB Cambridge
- Assignee: Carl Zeiss NTS Limited
- Current Assignee: Carl Zeiss NTS Limited
- Current Assignee Address: GB Cambridge
- Agency: Muirhead and Saturnelli, LLC
- Priority: EP07120619 20071113
- International Application: PCT/EP2008/065299 WO 20081111
- International Announcement: WO2009/062929 WO 20090522
- Main IPC: H01J37/26
- IPC: H01J37/26 ; G21K5/04

Abstract:
A beam device, in particular a particle beam device, for analyzing an object is provided, as well as a system comprising a particle beam device and an optical microscope for optically analyzing an object. The beam device simplifies the exchange and reduces the time of the exchange of objects to be examined. The beam device includes at least one beam generator that generates a beam, at least one objective lens that focuses the beam on an object arranged in a holding element. The objective lens comprises at least one connecting element. The holding element may be connected to the connecting element so that the holding element is removable from the connecting element for modification of the object. Alternatively, the holding element may be mounted to a beam column.
Public/Granted literature
- US20100224780A1 BEAM DEVICE SYSTEM COMPRISING A PARTICLE BEAM DEVICE AND AN OPTICAL MICROSCOPE Public/Granted day:2010-09-09
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