Invention Grant
US08530856B2 Beam device system comprising a particle beam device and an optical microscope 有权
光束装置系统,包括粒子束装置和光学显微镜

Beam device system comprising a particle beam device and an optical microscope
Abstract:
A beam device, in particular a particle beam device, for analyzing an object is provided, as well as a system comprising a particle beam device and an optical microscope for optically analyzing an object. The beam device simplifies the exchange and reduces the time of the exchange of objects to be examined. The beam device includes at least one beam generator that generates a beam, at least one objective lens that focuses the beam on an object arranged in a holding element. The objective lens comprises at least one connecting element. The holding element may be connected to the connecting element so that the holding element is removable from the connecting element for modification of the object. Alternatively, the holding element may be mounted to a beam column.
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