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US08530982B2 Micromechanical structure, method for manufacturing a micromechanical structure, and use of a micromechanical structure 有权
微机械结构，微机械结构的制造方法以及微机械结构的使用

Micromechanical structure, method for manufacturing a micromechanical structure, and use of a micromechanical structure
Abstract:
A micromechanical structure which includes a substrate having a main plane of extension, and a seismic mass which is movable relative to the substrate. The micromechanical structure includes a fixed electrode which is connected to the substrate, and a counterelectrode which is connected to the seismic mass. The fixed electrode has a first fixed electrode region and a second fixed electrode region which is connected in an electrically conductive manner to the first fixed electrode region. The counterelectrode is partially situated between the first and the second fixed electrode region, perpendicular to the main plane of extension.
Abstract(Chinese):

一种微机械结构，其包括具有主平面延伸的基板和相对于基板可移动的地震质量。 微机械结构包括连接到基板的固定电极和连接到地震块的反电极。 固定电极具有第一固定电极区域和与导电方式连接到第一固定电极区域的第二固定电极区域。 反电极部分地位于第一和第二固定电极区域之间，垂直于主延伸平面。

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