Invention Grant
- Patent Title: Method for producing solid state imaging device and solid-state imaging device
- Patent Title (中): 固态成像装置和固态成像装置的制造方法
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Application No.: US13172037Application Date: 2011-06-29
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Publication No.: US08530994B2Publication Date: 2013-09-10
- Inventor: Shu Sasaki
- Applicant: Shu Sasaki
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-149619 20100630
- Main IPC: H01L31/02
- IPC: H01L31/02

Abstract:
Certain embodiments provide a method for producing a solid-state imaging device including the steps of forming an interconnection layer, forming a passivation film, forming a resist layer, forming a plurality of protruding portions and an opening, and forming an electrode pad. In the step of forming the interconnection layer, the interconnection layer is formed on the surface of the semiconductor substrate having a photodiode. In the step of forming the resist layer, the resist layer is formed on the passivation film such that the resist layer has a plurality of first openings above the photodiode and has a second opening above the interconnection of the interconnection layer. In the step of forming the plurality of protruding portions and the opening, the plurality of protruding portions and the opening are formed by etching the passivation film via the resist layer.
Public/Granted literature
- US20120001292A1 METHOD FOR PRODUCING SOLID STATE IMAGING DEVICE AND SOLID-STATE IMAGING DEVICE Public/Granted day:2012-01-05
Information query
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