Invention Grant
- Patent Title: Semiconductor component with isolation trench intersections
- Patent Title (中): 半导体元件与隔离沟道交点
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Application No.: US12999658Application Date: 2009-06-19
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Publication No.: US08530999B2Publication Date: 2013-09-10
- Inventor: Ralf Lerner , Uwe Eckoldt
- Applicant: Ralf Lerner , Uwe Eckoldt
- Applicant Address: DE Erfurt
- Assignee: X-FAB Semiconductor Foundries AG
- Current Assignee: X-FAB Semiconductor Foundries AG
- Current Assignee Address: DE Erfurt
- Agency: Stevens & Showalter LLP
- Priority: DE102008029235 20080619
- International Application: PCT/EP2009/057706 WO 20090619
- International Announcement: WO2009/153356 WO 20091223
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
A semiconductor component with straight insulation trenches formed in a semiconductor material providing semiconductor areas laterally insulated from each other. Each insulation trench has a uniform width along its longitudinal direction represented by a central line. The semiconductor component has an intersecting area into which at least three of the straight insulation trenches lead. A center of the intersecting area is defined as a point of intersection of the continuations of the center lines. A central semiconductor area disposed in the intersecting area is connected with one of the semiconductor areas and contains the center of the intersecting area.
Public/Granted literature
- US20120098084A1 SEMICONDUCTOR COMPONENT WITH ISOLATION TRENCH INTERSECTIONS Public/Granted day:2012-04-26
Information query
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