Invention Grant
- Patent Title: Material structure in scribe line and method of separating chips
- Patent Title (中): 划线中的材料结构和分离芯片的方法
-
Application No.: US12952403Application Date: 2010-11-23
-
Publication No.: US08531008B2Publication Date: 2013-09-10
- Inventor: Thomas Fischer , Heinz Opolka
- Applicant: Thomas Fischer , Heinz Opolka
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L23/544
- IPC: H01L23/544

Abstract:
A method for manufacturing a chip is disclosed. The method comprises forming a material structure in a kerf adjacent the chip on a wafer. The method further comprises selectively removing the material structure in the kerf and dicing the wafer.A semiconductor wafer is disclosed. The semiconductor wafer comprises a plurality of chips and a plurality of kerfs. The kerfs separate the chips from each other. At least one kerf comprises a kerf framing. The kerf framing is arranged directly adjacent a side of the at least on chip.
Public/Granted literature
- US20120126228A1 Material Structure in Scribe Line and Method of Separating Chips Public/Granted day:2012-05-24
Information query
IPC分类: