Invention Grant
- Patent Title: IC device having electromigration resistant feed line structures
- Patent Title (中): 具有电迁移电源线结构的IC器件
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Application No.: US12970464Application Date: 2010-12-16
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Publication No.: US08531030B2Publication Date: 2013-09-10
- Inventor: Gregory Eric Howard , Patrick Thompson
- Applicant: Gregory Eric Howard , Patrick Thompson
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Steven A. Shaw; W. James Brady; Frederick J. Telecky, Jr.
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
An integrated circuit (IC) device includes an electromigration resistant feed line. The IC device includes a substrate including active circuitry. A back end of the line (BEOL) metallization stack includes an interconnect metal layer that is coupled to a bond pad by the EM resistant feed line. A bonding feature is on the bond pad. The feed line includes a uniform portion and patterned trace portion that extends to the bond pad which includes at least three sub-traces that are electrically in parallel. The sub-traces are sized so that a number of squares associated with each of the sub-traces are within a range of a mean number of squares for the sub-traces plus or minus twenty percent or a current density provided to the bonding feature through each sub-trace is within a range of a mean current density provided to the bonding feature plus or minus twenty percent.
Public/Granted literature
- US20120153458A1 IC DEVICE HAVING ELECTROMIGRATION RESISTANT FEED LINE STRUCTURES Public/Granted day:2012-06-21
Information query
IPC分类: