Invention Grant
- Patent Title: Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method
- Patent Title (中): 放电灯，光源装置，曝光装置和曝光装置的制造方法
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Application No.: US11896416Application Date: 2007-08-31
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Publication No.: US08531093B2Publication Date: 2013-09-10
- Inventor: Hiroshi Shirasu , Yasuo Aoki , Motoo Koyama , Takayuki Kikuchi
- Applicant: Hiroshi Shirasu , Yasuo Aoki , Motoo Koyama , Takayuki Kikuchi
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JPP2006-237252 20060901; JPP2007-006462 20070115; JPP2007-127451 20070511
- Main IPC: H01J7/26
- IPC: H01J7/26 ; H01J1/02 ; H01J61/52 ; F21V29/00 ; H01R13/00
Abstract:
A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.
Public/Granted literature
- US20080218049A1 Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method Public/Granted day:2008-09-11
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