Invention Grant
US08531527B2 Acoustic-wave sensor, acoustic-wave sensor array, and ultrasonic imaging apparatus 有权
声波传感器,声波传感器阵列和超声波成像装置

Acoustic-wave sensor, acoustic-wave sensor array, and ultrasonic imaging apparatus
Abstract:
An acoustic-wave sensor (10) is constructed by a membrane (11) adapted to be displaced by an acoustic wave, a first waveguide (16a) for transmitting light therein, an optical coupling part (15) to which the light transmitted through the first waveguide (16a) is adapted to be optically coupled, and a second waveguide (16b) through which the light coupled from the optical coupling part (15) transmits. When the membrane (11) is displaced by its reception of the acoustic wave, at least one of an optical coupling coefficient between the first waveguide (16a) and the optical resonator (15) and an optical coupling coefficient between the second waveguide (16b) and the optical resonator (15) is changed to output a corresponding optical signal.
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