Invention Grant
- Patent Title: Frequency-shifting interferometer with selective data processing
- Patent Title (中): 具有选择性数据处理的频移干涉仪
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Application No.: US13110377Application Date: 2011-05-18
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Publication No.: US08531677B2Publication Date: 2013-09-10
- Inventor: Thomas James Dunn , Christopher Alan Lee , Mark Joseph Tronolone
- Applicant: Thomas James Dunn , Christopher Alan Lee , Mark Joseph Tronolone
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Timothy M Schaeberle
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A frequency-shifting interferometer is arranged for measuring an optical profile of a test object with a continuously tunable light source. A succession of the interference images of the test object are captured together with a measure of the beam frequencies at which interference images are formed. A limited number of the captured interference images of the test object are selected so that the monitored beam frequencies approximately match a predetermined beam frequency spacing pattern. Further processing proceeds based on the selected interference images.
Public/Granted literature
- US20110292405A1 FREQUENCY-SHIFTING INTERFEROMETER WITH SELECTIVE DATA PROCESSING Public/Granted day:2011-12-01
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