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US08531677B2 Frequency-shifting interferometer with selective data processing 有权
具有选择性数据处理的频移干涉仪

Frequency-shifting interferometer with selective data processing
Abstract:
A frequency-shifting interferometer is arranged for measuring an optical profile of a test object with a continuously tunable light source. A succession of the interference images of the test object are captured together with a measure of the beam frequencies at which interference images are formed. A limited number of the captured interference images of the test object are selected so that the monitored beam frequencies approximately match a predetermined beam frequency spacing pattern. Further processing proceeds based on the selected interference images.
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