Invention Grant
US08531747B2 Hologram, hologram data generation method, and exposure apparatus
有权
全息图，全息图数据生成方法和曝光装置
- Patent Title: Hologram, hologram data generation method, and exposure apparatus
- Patent Title (中): 全息图，全息图数据生成方法和曝光装置
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Application No.: US12491094Application Date: 2009-06-24
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Publication No.: US08531747B2Publication Date: 2013-09-10
- Inventor: Isao Matsubara , Yasuyuki Unno , William Dallas
- Applicant: Isao Matsubara , Yasuyuki Unno , William Dallas
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc IP Division
- Main IPC: G02B5/32
- IPC: G02B5/32 ; G03B27/54 ; G03H1/00 ; G03H1/08
Abstract:
The present invention provides a hologram which forms a light intensity distribution on a predetermined plane by using an incident light. The hologram includes a plurality of cells configured to control both a phase of a first polarized light component of the incident light and a phase of a second polarized light component. The plurality of cells are designed to form a portion in an overlap region in which a first light intensity distribution region formed on the predetermined plane by the first polarized light component and a second light intensity distribution region formed on the predetermined plane by the second polarized light component are superposed on each other. The phase of the first polarized light component is diffused in the portion formed in the overlap region.
Public/Granted literature
- US20100328742A1 HOLOGRAM, HOLOGRAM DATA GENERATION METHOD, AND EXPOSURE APPARATUS Public/Granted day:2010-12-30
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