Invention Grant
- Patent Title: System and method for direct imaging
-
Application No.: US13213360Application Date: 2011-08-19
-
Publication No.: US08531751B2Publication Date: 2013-09-10
- Inventor: Stefan Heinemann , Wolfgang Retschke , Holger Wagner , Jonas Burghoff , Abraham Gross
- Applicant: Stefan Heinemann , Wolfgang Retschke , Holger Wagner , Jonas Burghoff , Abraham Gross
- Applicant Address: IL Yavne DE Jena
- Assignee: Orbotech Ltd.,Laser Imaging Systems GmbH & Co. KG
- Current Assignee: Orbotech Ltd.,Laser Imaging Systems GmbH & Co. KG
- Current Assignee Address: IL Yavne DE Jena
- Agency: Sughrue Mion, PLLC
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.
Public/Granted literature
- US20130044360A1 SYSTEM AND METHOD FOR DIRECT IMAGING Public/Granted day:2013-02-21
Information query