Invention Grant
- Patent Title: Pivotable MEMS device
- Patent Title (中): 数据透视MEMS器件
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Application No.: US13281475Application Date: 2011-10-26
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Publication No.: US08531752B2Publication Date: 2013-09-10
- Inventor: Abdul Jaleel K. Moidu
- Applicant: Abdul Jaleel K. Moidu
- Applicant Address: US CA Milpitas
- Assignee: JDS Uniphase Corporation
- Current Assignee: JDS Uniphase Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Teitelbaum & MacLean
- Agent Neil Teitelbaum; Doug MacLean
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A tiltable MEMS device is disclosed having an asymmetric, electrostatically actuated tiltable platform and a reflector mounted on the platform so that the platform is hidden below the reflector, except for a portion of long side of the platform extending from under the reflector. An electrostatic stator actuator is mounted on the substrate under the long side of the tiltable platform. The range of a unidirectional tilt is increased by providing a recess in the substrate under the extended portion of the platform to accommodate the increased range of movement of the tiltable platform.
Public/Granted literature
- US20120281266A1 PIVOTABLE MEMS DEVICE Public/Granted day:2012-11-08
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