Invention Grant
- Patent Title: Dielectric microstructure for use in microelectromechanical systems and method of forming same
- Patent Title (中): 用于微机电系统的介电微结构及其形成方法
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Application No.: US12344526Application Date: 2008-12-28
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Publication No.: US08531759B2Publication Date: 2013-09-10
- Inventor: Larry Joseph Hombeck
- Applicant: Larry Joseph Hombeck
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Warren L. Franz; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
Disclosed herein is a dielectric microstructure with a substantially unit dielectric constant K for use in microelectromechanical systems.
Public/Granted literature
- US20100007936A1 DIELECTRIC MICROSTRUCTURE FOR USE IN MICROELECTROMECHANICAL SYSTEMS Public/Granted day:2010-01-14
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